Molecular Dynamics Simulations of Sputtering

E.M. Bringa* and R.E. Johnson**
*Physics Department, **Engineering Physics Department
University of Virginia, Charlottesville, VA 22903 USA
Abstract
Motivation
Experiments
Thermal Spike Model
Molecular Dynamics
0.4 ps
2.7 ps
9.5 ps
47.9 ps
Transport
Themal Equilibrium
Melting
Temperature Profiles
Scalling of the Sputtering Yield
MD vs. Thermal Spike Models
Conclusions
References